Magnetic Materials and Components
Technical Lecture Session
Magnetics and Passive Components
On-chip inductor, magnetic material, thin-film magnetic core, power conversion
In this paper, we are reporting the design, fabrication and characterization of on-chip solenoid inductors with novel magnetic thin-film core for high frequency DC-DC power conversion application. Our CMOS — BEOL process compatible micro-inductor fabricated shows a high L/Rdc up to 440nH/ohm due to a thick Cu winding, as well as a high inductance density of 440nH/mm2 and high Q factor of 14.5 at 10MHz which results from inclusion of laminated Co-based magnetic core which is amorphous and shows very good soft magnetic properties. The on-chip magnetic-film inductor technology is targeted at applications that enable high frequency (>10MHz) DC-DC power conversion.