Balanced Electrostatic All-Silicon MEMS Speakers

On Demand

Co-Author(s)

HS

Hermann A. G. Schenk

CEO
Arioso Systems GmbH
Dresden, Sachsen, Germany

Presenting Author(s)

Lutz Ehrig

Head of Technical Marketing and Business Development
Arioso Systems GmbH
Dresden, Sachsen, Germany

Slides

Co-author(s)

FW

Franziska Wall

Ph.D. Student
Fraunhofer IPMS
Dresden, Sachsen, Germany
BK

Bert Kaiser

Team Leader
Fraunhofer IPMS
Dresden, Sachsen, Germany
MS

Michael Stolz

Ph.D. Student
Fraunhofer IPMS
Cottbus, Brandenburg, Germany
SL

Sergiu Langa

Fraunhofer IPMS
Dresden, Sachsen, Germany
DS

David Schuffenhauer

Fraunhofer IPMS
Cottbus, Sachsen, Germany
JM

Jorge Mario Monsalve Guaracao

Ph.D. Student
Fraunhofer IPMS
Dresden, Sachsen, Germany
Anton Melnikov

Research Associate
Fraunhofer IPMS
Dresden, Sachsen, Germany
HC

Holger Conrad

Business Unit Manager
Fraunhofer IPMS
Dresden, Sachsen, Germany

MEMS based microspeakers have recently become a vibrant field of research and development. Benchmarks for size, power consumption and cost efficiency are very demanding. Electrostatic MEMS actuators offer a high potential to meet both, commercial and technical targets. In this contribution we report for the first time a balanced electrostatic MEMS µSpeaker, using two antagonistic electrostatic forces, improving electromechanical stability and harmonic distortion. The distinction to state-of-the-art MEMS push-pull actuators and the acoustic performance is presented..