Business Unit Manager Fraunhofer IPMS Dresden, Sachsen, Germany
MEMS based microspeakers have recently become a vibrant field of research and development. Benchmarks for size, power consumption and cost efficiency are very demanding. Electrostatic MEMS actuators offer a high potential to meet both, commercial and technical targets. In this contribution we report for the first time a balanced electrostatic MEMS µSpeaker, using two antagonistic electrostatic forces, improving electromechanical stability and harmonic distortion. The distinction to state-of-the-art MEMS push-pull actuators and the acoustic performance is presented..